Vacuum line for the deposition of mirror coatings

 

Following our telephone conversation, to send you information on the production line of vacuum deposition mirror coatings. The vacuum line which may include three to five working vacuum chambers. The number of chambers is determined by the technology and capacity of the line. Including the selected required number of magnetrons. In the polish version in the chamber is 3 magnetron. The line is mainly designed for the application of mirror coatings. To extend the range of colors appropriate to the introduction of ion sources, and magnetron plasma analyzer with a narrow target (width 80-85 mm).

The approximate production time 8-12 months depending on the configuration and composition of the line.

  1. Vacuum processing line may include 3-5 chambers depending on the type of coating.
    • I - the chamber loading and preheating. Pp = (5*2.10 - 2.10) mm Hg.
    • II - heating chamber and ion cleaning. Pp = (3.10 - 4.10) mm Hg.
    • III - chamber deposition of the 1st sub-layer coating or Pp = (5*10-2 - 5*10-3) mm Hg. The number of magnetrons - 2 pcs.
    • IV - the coating chamber. Pp = (5*10-2 - 5*10-3) mm Hg.
    • The number of magnetrons - 2 pcs.
    • Depending on the camera technology III and IV can be combined.
    • V - the cooling chamber and unloading.
  2. The size of the working chambers: length - 2500 mm, width - 1500 mm, height - 4000 mm.
  3. Target size: 1400*80 mm.
  4. Magnetron power sources - 350 kW.
  5. Chamber I, V - forvakuum pumping system.
  6. Chamber II, III, IV - high-vacuum pumping system.
  7. Speed of action fore-vacuum units - (1000-1500) l/s.
  8. The number of gates - 6 pcs.
  9. The number of high-vacuum diffusion and boost pumps - 3 pieces.
  10. The line capacity - up to 250,000 m2/year.
  11. Number of power racks - 2 pcs. Rack size power magnetron and ion sources - 1500*600*1900 mm.
  12. Stance control process parameters - 1 pc. Rack size - 1500*600*1900 mm.
  13. Stand process control - 1 pc. Rack size - 1500*1000*1700 mm.
  14. The area occupied by the line:
    • The mechanical part (chamber gate and loading zone) - 15000*2500 mm.
    • The pumping system - 8000*2000 mm.
    • Electrics - 6000*1500 mm.
Best regards, Award Winner Republic of Belarus, Dr. Alexander Mazurkevich!

 

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