Sources of Mo, V, W and Other Solids Ion Sources with Energy to 50000 eV
The modification of a surface by middle energy ions provides increasing of properties of those products for which the other methods of treatment are practically impossible. The low temperature of the process (to 70° C), the preservation of geometrical sizes allow to carry out treatment of precisional parts.
Technological possibilities and specifications
- Energy of ions, eV - to 50000.
- Power supply, kW - to 15.
- Operation pressure, Pa - (10-2 . 6x10-4).
- Ions - Mo, V, W, Cr, etc.
- Effective operation zone, mm - 100x500.
Products for treatment: bores diameter (0,2-3) mm, medical tool, plunger pairs, filters, etc.