Ion Sources

In modern technologies of deposition of coatings by vacuum methods, ion sources appear a necessary technological tool.

Thus, they to provide either cleaning of a surface or concomitant treatment and relaxation of arising voltages in the formed coatings.

The combination of a surface modification by ions of low and middle energies and coating deposition allows to form coatings with high spectral, physical and mechanical and operational properties.

Ion sources Ion sources

Specifications of the ion sources

  • Ion energy, eV - 0-3000.
  • Operational zone dimensions, mm:
    - isotropically on the whole volume of a chamber for coaxial sources;
    - LxBxH - (150-900)x80x300 for sources with the ion beam of a rectangular form.
  • Working current, A:
    - 0-10 - for coaxial;
    - 0-1 - for sources with a beam of the rectangular form.
  • Power supply, kW - 2.5, 5.0, 7.0.

 

See also: